Straightness Error Compensation Servo-system for Single-axis Linear Motor Stage

Since straightness error of linear motor stage is hardly dependent upon machining accuracy and assembling accuracy, there is limit on maximum realizable accuracy. To cope with this limitation, this paper proposed a servo system to compensate straightness error of a linear motor stage. The servo system is mounted on the slider of the linear motor stage and moves in the direction of the straightness error so as to compensate the error. From position dependency and repeatability of the straightness error of the slider, a feedforward compensation control is applied to the platform servo control. In the consideration of required fine positioning accuracy, a platform driven by an electro-magnetic actuator is suggested and a sliding mode control was applied. The effectiveness of the sliding mode control was verified along with some experimental results. Keywords—Linear Motor Stage, Straightness Error, Friction, Sliding Mode Control.